This paper describes the test results of sensitive element of MEMS structures developed in "Techcenter" Southern federal university. The tests were carried out on Polytec MSA-500 equipment with the techniques of scanning Doppler vibrometry and stroboscopic video microscopy in a vacuum chamber. Such tests are standard in the study of amplitude-frequency characteristics of microelectromechanical (MEMS) devices and are relevant for the design of high-precision inertial sensing elements according to the modern trends in the development of MEMS inertial sensors.

Mathematical and simulation models were obtained in the early stages of research. These models are used as initial data for development of finite element models. The creating methodology of uniaxial MEMS angular velocity sensor design is described considering technological features of manufacture and its verification before the manufacture of photomasks. Techniques are described which enable to approximate the final model to the calculated ones.

A comparison of the amplitude-frequency characteristics obtained in the numerical experiment conducted using the finite element analysis with the natural experiment results is given. In the course of work we investigated various operation modes of the electrostatic actuator. The minimum allowable pressure for the stable operation of the device and the optimum mode for the excitation of inertial mass were experimentally determined. The influence of the amplitude of the primary and secondary oscillations, q-quality dual axis resonator and the degree of vacuum was studied. Conclusions about the experiment results and the accuracy of the calculations and the plan of further works on the creation of a uniaxial MEMS sensor is given.